設施農業：節能栽培與滅菌【國立暨南國際大學應用材料及光電工程學系/國立中興大學材料科學與工程學系/武東星 校長/客座教授】
| 論文篇名 | 英文：Synthesis of SiO2-coated CdSe/ZnS quantum dots using various dispersants in the photoresist for color-conversion micro-LED displays 中文：在光阻中使用各種分散劑合成CdSe/ZnS@SiO2量子點用於色轉型微發光顯示器 |
| 期刊名稱 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING |
| 發表年份,卷數,起迄頁數 | 2022, 148, 106790 |
| 作者 | Chang, Kai-Ping; Wu, Chung-Jui; Lo, Chih-Wei; Lin, Yu-Shan; Yen, Chao-Chun; Wuu, Dong-Sing(武東星)* |
| DOI | 10.1016/j.mssp.2022.106790 |
| 中文摘要 | 量子點(QDs)由於其明確的、可調諧的發射波長而成為下一代顯示幕幕設備的一種有前景的技術。然而，量子點可以與外界環境發生化學反應，這限制了它們的光發光效率，降低了它們的可靠性。此外，還需要進一步研究用於製造量子點的黃光微影技術，以使它們與半導體製造相容。本研究利用四乙氧基矽烷合成了二氧化矽(SiO2)包覆硒化鎘/硫化鋅量子點，量子點波長在520 ~ 625 nm之間可調。SiO2的鈍化層不僅提高了69%的光致發光強度(PLI)，而且有效地降低了100 h後的螢光衰減率(PLI衰減率<1%)。此外，SiO2塗層的量子點的親水性使其能夠與適當的分散劑和光阻整合，在藍色微發光二極體(LED)顯示器的顏色轉換層上形成50 × 50 μm圖元大小的圖像。最後，利用TFCalc軟體合成了分散式布拉格反射器(DBR)的結構。隨後，將DBR層沉積在紅綠QDs顏色轉換層上，以創建全彩微LED顯示器。 |
| 英文摘要 | Quantum dots (QDs) are a promising technology for next-generation display screen equipment due to their well-defined and tunable emission wavelengths. However, QDs can be chemically reactive with the external environment, and this limits their photoluminescence efficiency and reduces their reliability. In addition, further work is needed on the lithography techniques used to make QDs to make them compatible with semiconductor manufacturing processes. In this study, silicon dioxide (SiO2)-coated cadmium selenide/zinc sulfide QDs are synthesized using tetraethoxysilane so that the wavelength of the QDs is adjustable between 520 and 625 nm. The passivation layer of SiO2 not only enhances the photoluminescence intensity (PLI) by 69% but also effectively decelerates the fluorescence decay rate (<1% PLI decay after 100 h). In addition, the hydrophilicity of the SiO2-coated QDs enables them to integrate with the appropriate dispersants and photoresists to create a 50 × 50 μm pixel size on the color-conversion layer of a blue microlight emitting diode (LED) display. Finally, the structure of a distributed Bragg reflector (DBR) is synthesized using TFCalc software. Subsequently, the DBR layer is deposited on the red–green QDs color-conversion layer to create a full-color micro-LED display. |
| 發表成果與本中心研究主題相關性 | 針對全彩 LED 提出改善方案，包括合成不同顏色之量子點，作為色轉換層，並整合黃光微影精密製程，可應用於農業栽培之高效率光源。 |
