設施農業：節能栽培與滅菌【國立暨南國際大學應用材料及光電工程學系/國立中興大學材料科學與工程學系/武東星 校長/客座教授】
| 論文篇名 | 英文：Deposition of high-transmittance ITO thin films on polycarbonate substrates for capacitive-touch applications 中文：沉積高透射率氧化銦錫薄膜於聚碳酸酯基板之電容式觸控的應用 |
| 期刊名稱 | Vacuum |
| 發表年份,卷數,起迄頁數 | 2021, 186, no.110046 |
| 作者 | Chiang, Jung-Lung; Li, Shui-Wen; Yadlapalli, Bharath Kumar; Wuu, Dong-Sing(武東星)* |
| DOI | 10.1016/j.vacuum.2021.110046 |
| 中文摘要 | 本研究使用具有雙功率（RF 疊加 DC）四靶磁控濺鍍系統在低溫（25–120℃）製程沉積氧化銦錫薄膜於聚碳酸酯基板上。研究實現了350-500 Ω/sq 的薄層電阻、~10-4 Ω-cm 的電阻率和可見光範圍內 88% 的透光率。此外，模擬和實驗結果發現，沉積20奈米厚ITO膜於兩層和四層抗反射膜（SiO2/TiO2和 SiO2/TiO2/SiO2/TiO2）結構，可以改善透光特性，多層堆疊（ITO/抗反射膜/PC）的透光率可達 91%，比裸 ITO-on-PC 樣品的透光率高約 3%。實驗結果還表明，ITO/抗反射膜/PC結構具有低濁度（霧度<0.08%）、優異的附著力（ASTM等級為5B）和硬度（2H-4H）可適用於電容式觸控面板的應用。 |
| 英文摘要 | In this study, a dual-power (RF-superimposed DC) with four-target magnetron sputtering system was used to deposit transparent, conducting indium-tin-oxide (ITO) films on polycarbonate (PC) substrates at low temperatures process (25–120 ◦C). A sheet resistance of 350–500 Ω/sq, resistivity of ~10-4 Ω-cm, and light transmittance of 88% in the visible range were achieved. In addition, the simulation and experimental results showed that the deposited 20-nm-thick ITO film with two- and four-layer anti-reflective film (SiO2/TiO2 and SiO2/TiO2/SiO2/TiO2) structures could improve the light penetration characteristics. The transmittance of the multilayer stack (ITO/anti-reflective films/PC) can reach 91% which is ~3% higher than that of the bare ITO-on-PC sample. The experimental results also showed that the low turbidity (haze < 0.08%), excellent adhesion (ASTM class is 5B), and hardness (2H–4H) of ITO/anti-reflection films/PC structure could be suitable for capacitive touch panel applications. |
| 發表成果與本中心研究主題相關性 | 本研究使用雙功率（RF 疊加 DC）磁控濺鍍系統的在低溫製程下沉積氧化銦錫薄膜於聚碳酸酯基板上，利用雙層或四層抗反射層結構提升光穿透率，以應用於電容式觸控面板。其中發現，沉積20奈米厚 ITO 膜於兩層和四層抗反射膜（SiO2/TiO2和 SiO2/TiO2/SiO2/TiO2）結構，可以改善透光特性，多層堆疊（ITO/抗反射膜/PC）的透光率可達 91%，比裸 ITO-on-PC 樣品的透光率高約 3%，大大提升電容式觸控面板之應用。高透光特性可應用於農業監控設備觸控面板或螢幕。 |
