Facility Agriculture: Energy Saving and Sterilization【Department of Applied Materials Optoelectronic Engineering, National Chi Nan University / Wuu, Dong-Sing / President / Professor】
設施農業：節能栽培與滅菌【國立暨南國際大學應用材料及光電工程學系/國立中興大學材料科學與工程學系/武東星 校長/客座教授】
論文篇名 英文：Ga2O3 Nanorod-Based Extended-Gate Field-Effect Transistors for pH Sensing
中文：用於 pH 感測器對於基於 Ga2O3 奈米棒的擴展柵極場效應電晶體
期刊名稱 MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS
發表年份,卷數,起迄頁數 2022, 276, 115542
作者 Chiang, Jung-Lung; Shang, Yi-Guo; Yadlapalli, Bharath Kumar; Yu, Fei-Peng; Wuu, Dong-Sing(武東星)*
DOI 10.1016/j.mseb.2021.115542
中文摘要 基於擴展柵極場效應電晶體的氧化鎵 (Ga2O3) 奈米棒的 pH 傳感特性通過化學浴沉積在 ITO/玻璃上生長。使用掃描電子顯微鏡、X 射線衍射、能量色散光譜法、透射電子顯微鏡 (TEM)、傅里葉變換紅外光譜 (FTIR) 和拉曼光譜儀器對 Ga2O3 奈米棒進行了觀察。實驗結果表明，α-Ga2O3 納米棒在 400-600°C 退火 1 小時後具有多個晶向（[104]、[110]、[024]、[116]）。 FTIR 和拉曼光譜測量證實了 Ga-O 和 Ga-OH 彎曲模式的存在。通過TEM觀察，奈米棒具有良好的晶體質量和原子晶格排列。此外，Ga2O3/ITO pH 傳感器具有高 pH 靈敏度（51.59–64.29 mV/pH）、良好的線性度（98.5%–99.8%）和長期穩定性（漂移，2.75 mV/h；pH = 7）。總體而言，α- Ga2O3 可用作基於 FET 的低成本製造傳感器，用於 pH 或生物傳感器。
英文摘要 In this study, the pH-sensing characteristics of gallium oxide (Ga2O3) nanorods based on an extended-gate fieldeffect transistor were grown on the ITO/glass via chemical bath deposition. Ga2O3 nanorods were observed using scanning electron microscopy, X-ray diffraction, energy-dispersive spectrometry, transmission electron microscopy (TEM), Fourier transform infrared spectroscopy (FTIR), and Raman spectrum instruments. The experimental results showed that the α- Ga2O3 nanorods had several crystalline orientations ([104], [110], [024], [116]) after being annealed at 400–600 ◦C for 1 h. The FTIR and Raman spectrum measurements confirmed the existence of Ga-O and Ga-OH bending modes. As observed by the TEM, the nanorods had a good crystal quality and atomic lattice arrangement. In addition, the Ga2O3/ITO pH sensor possessed high pH sensitivity (51.59–64.29 mV/pH), good linearity (98.5%–99.8%), and long-term stability (drift, 2.75 mV/h; pH = 7). Overall, the α-Ga2O3 could be used as a low-cost FET-based manufacturing sensor for pH or biosensors.
發表成果與本中心研究主題相關性 本研究之Ga2O3/ITO pH 傳感器具有高 pH 靈敏度（51.59–64.29 mV/pH）、良好的線性度（98.5%–99.8%）和長期穩定性（漂移，2.75 mV/h；pH = 7）。總體而言，α-Ga2O3 可用作基於 FET 的低成本製造傳感器，用於農業上 pH 及植物傳感器。