VLS growth of pure and Au decorated β-Ga2O3 nanowires for room temperature CO gas sensor and resistive memory applications | IDCSA, NCHU

VLS growth of pure and Au decorated β-Ga2O3 nanowires for room temperature CO gas sensor and resistive memory applications 2020-08-08

Novel Material Agriculture: Novel Environment Friendly Material and Safety Evaluation【Department of Physics / Ho, Mon-Shu / Professor】
新穎材料農業：友善環境農業新穎材料研發與安全評估【物理學系/何孟書教授】

論文篇名	VLS growth of pure and Au decorated β-Ga₂O₃ nanowires for room temperature CO gas sensor and resistive memory applications
期刊名稱	Applied Surface Science
發表年份,卷數,起迄頁數	2020, 533(15) 147476
作者	Weng, Tzu-Feng; *Ho, Mon-Shu(何孟書); Sivakumar, Chandrasekar(陳德森); Balraj, Babu; Chung, Pei-Fang(鍾佩芳**)
DOI	10.1016/j.apsusc.2020.147476
中文摘要	通過汽-液-固生長法在矽(1 0 0)基板上成長了高密度單晶β-Ga₂O₃奈米線。我們研究純 β-Ga₂O₃ 奈米線以及 Au 修飾的 β-Ga₂O₃ 奈米線的結構表徵。並將陣列和單奈米線器件的純奈米線和 Au 裝飾奈米線其製成室溫 (RT) 下的 CO 氣體傳感器。一維奈米結構的直徑範圍約為 127 ± 5 nm。材料特性使用場發射掃描電子顯微鏡 (FESEM)、透射電子顯微鏡 (TEM)、能量色散 X 射線光譜 (EDS)、漸進入射 X 射線衍射 (GI-XRD)、光致發光 (PL)、拉曼研究合成的納米線光譜和 X 射線光電子能譜 (XPS)觀測。單奈米線氣體傳感器裝置元件利用聚焦離子束 (FIB) 技術製造。Au 修飾的 β-Ga₂O₃ 奈米線的 RT CO 氣體傳感器在室溫下對 100 ppm CO 氣體有相當顯著的靈敏度。此外，我們比較了網狀 Au 修飾 β-Ga₂O₃ 奈米線與單根 Au 修飾 β-Ga₂O₃ 奈米線和單根純 β-Ga₂O₃ 奈米線的 RT CO 氣敏特性。並與 Au/純 β-Ga₂O₃ 納米線/p-Si 和 Au/Au 修飾的β-Ga₂O₃ 奈米線/p-Si 結構的雙極電阻開關特性作比較。
英文摘要	High-density single crystalline β-Ga₂O₃ nanowires on silicon (1 0 0) substrates were grown by vapour-liquid- solid growth method. We have characterized the pure β-Ga₂O₃ nanowires along with the Au-decorated β-Ga₂O₃ nanowires. The CO gas sensors at room temperature (RT) have been studied for pure and Au decorated nano- wires with multiple-networked array and single nanowire devices. The diameter of the 1D nanostructure ranged from 127 ± 5 nm. The synthesized nanowires were studied using Field Emission Scanning Electron Microscope (FESEM), Transmission Electron Microscope (TEM), Energy Dispersive X-ray Spectroscopy (EDS), Gracing Incidence X-ray Diffraction (GI-XRD), Photoluminescence (PL), Raman spectroscopy and X-ray Photoelectron Spectroscopy (XPS). Using the Focussed Ion Beam (FIB) technique, single nanowire gas sensor devices were fabricated. Single nanowire RT CO gas sensors using the proposed Au decorated β-Ga₂O₃ nanowire achieved remarkable sensitivity for 100 ppm CO gas at room temperature. Besides, we have compared the RT CO gas sensing properties of multiple-networked Au decorated β-Ga₂O₃ nanowires with single Au-decorated β-Ga₂O₃ nanowire and single pure β-Ga₂O₃ nanowire. In addition, bipolar resistive switching property is inspected for the Au/pure β-Ga₂O₃ nanowires/p-Si and Au/Au decorated β-Ga₂O₃ nanowires/p-Si structures.
發表成果與本中心研究主題相關性	Metal oxide nanoparticles are the material candidates for testing toxicity in biosystem. Pure and Au decorated β-Ga₂O₃ single nanowire were prepared using VLS technique. The room temperature CO gas sensing properties were studied for both Bulk and single nanowire fabricated devices. Moreover, we have demonstrated the resistive switching characteristics of the pure and Au decorated β-Ga₂O₃.